Elimination of remnant phases in low-temperature growth of wurtzite ScAlN by molecular-beam epitaxy

Elimination of remnant phases in low-temperature growth of wurtzite ScAlN by molecular-beam epitaxy
Brandon Dzuba, Trang Nguyen, Amrita Sen, Rosa E. Diaz, Megha Dubey, Mukesh Bachhav, Janelle P. Wharry, Michael J. Manfra, and Oana Malis. Journal of Applied Physics [PDF] [DOI]