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Microsoft Quantum Purdue utilizes the Scifres Nanofabrication Laboratory, a 25,000 sq. ft. bay-chase cleanroom at the Birck Nanotechnology Center. Within this cleanroom facility, 45% of the bays operate at ISO 3 (Class 1), 40% operate at ISO 4 (Class 10), and the remaining 15% operate at ISO 5 (Class 100). In addition to the shared resources at Birck, Microsoft Quantum Purdue has dedicated equipment for processing including an Elionix electron beam lithography system, a PVD metal deposition system with ion mill and SIMS end point detection, and a Picosun plasma-assisted atomic layer deposition (ALD) system.