AlGaN/GaN HEMTs grown by molecular beam epitaxy on sapphire, 6H-SiC, and HVPE-GaN templates

AlGaN/GaN HEMTs grown by molecular beam epitaxy on sapphire, 6H-SiC, and HVPE-GaN templates
N. G. Weimann, M. J. Manfra, J. W. P. Hsu, K. Baldwin, L. N. Pfeiffer, W. West, S. N. G. Chu, D. V. Lang, and R. J. Molnar.. Compound Semiconductors 2002 174, 223-226 [PDF]