Submicron AlGaN/GaN HEMTs with very high drain current density grown by plasma-assisted MBE on 6H-SiC

Submicron AlGaN/GaN HEMTs with very high drain current density grown by plasma-assisted MBE on 6H-SiC
N. G. Weimann, M. J. Manfra, S. Chakraborty, and D. A. Tennant.. IEEE Electron Device Letters 23 12, 691-693 [PDF]